C-MEMS_Process_Complete_256kbps

Carbon-MEMS (C-MEMS) refers to a microfabrication technique in which photopatterned resists, heat treated (pyrolyzed) at different temperatures in different ambient gases, are used as a carbonaceous structural and functional material for micro electromechanical systems (MEMS). This new material permits an entire new variety of novel MEMS applications that employ structures having a wide variety of shapes, resistivities and mechanical properties. Moreover, carbon surfaces form better electrochemical electrodes and are easier to derivatize with organic molecules than more traditional MEMS materials such as silicon.
For more reading:
M. Madou et al. "Carbon Micromachining (C-MEMS)", Electrochem. Soc. Proceed. 97-19, pp. 61-69, 1997.
C. Wang, G. Jia, L. Taherabadi and M. Madou, A Novel Method for the Fabrication of High-Aspect Ratio C-MEMS Structures, J. of Microelectromech. Systems, vol. 14(2), pp. 348-358, 2005.