Electromagnetic levitation to improve semiconductor, display manufacturing

Defects in semiconductors and displays are often caused by dust and moisture.
To prevent these problems and improve productivity, researchers have developed a technology that can transport large items using electromagnets.
Park Se-young has more.
Semiconductor and OLED display production requires a process called evaporation, a method of thin-film deposition.
This requires a clean manufacturing environment, as dust or moisture can cause defects.
Korean researchers have developed a technology that uses electromagnetic levitation to move large items without making dust.

"This non-contact method does not generate dust or moisture. It can be used in vacuums, and be used for chemical vapor deposition and the OLED manufacturing process."

In a vacuum, the technology uses electromagnets to lift an 800-kilogram carrier and transport it between the motors.
The technology was originally used for magnetic levitation trains at Incheon International Airport.
Free of wheels, the technique does not generate dust and can maintain a steady speed through precision control.
The technology has been transferred to a local company to be further developed and commercialized.
Park Se-young, Arirang News.